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Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design

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6 Author(s)
Tien-liang Hsieh ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei ; Yao-tien Chang ; Sheng-jie Chiou ; Jui-che Tsai
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A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008