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Analytical Model Studying of a Novel Tunable Capacitor Based on Bimetallic Thermal Actuator
Kouravand, S.   Mehrban, M.   Rezazadeh, G.   Sabet, M.  
Urmia Univ., Urmia;

This paper appears in: Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Publication Date: Oct. 29 2006-Dec. 1 2006
On page(s): 218-222
Location: Kuala Lumpur,
ISBN: 0-7803-9730-4
INSPEC Accession Number: 9892840
Digital Object Identifier: 10.1109/SMELEC.2006.381051
Current Version Published: 2007-07-02

Abstract
This paper presents a novel tunable capacitor with bimetallic thermal actuator in micro scale which its design was based on the tip deflection of bimetallic cantilever beam. Thermo electro mechanical governing equations were derived. Design steps are described and calculated results show that using of the proposed tunable capacitor can achieve large tuning ratio.

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