Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design
Tien-liang Hsieh
Yao-tien Chang
Sheng-jie Chiou
Jui-che Tsai
Dooyoung Hah
Wu, M.C.
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei;
This paper appears in: Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Publication Date: 11-14 Aug. 2008
On page(s): 108-109
Location: Freiburg,
ISBN: 978-1-4244-1917-3
INSPEC Accession Number: 10179832
Digital Object Identifier: 10.1109/OMEMS.2008.4607852
Current Version Published: 2008-08-26
Abstract
A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.
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