A Two-Axis MEMS Scanner Driven by Radial Vertical Combdrive Actuators
Sheng-jie Chiou
Tien-liang Hsieh
Jui-che Tsai
Chia-Wei Sun
Dooyoung Hah
Wu, M.C.
Nat. Taiwan Univ., Taipei;
This paper appears in: Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Publication Date: Aug. 12 2007-July 16 2007
On page(s): 83-84
Location: Hualien,
ISBN: 978-1-4244-0641-8
INSPEC Accession Number: 9682800
Digital Object Identifier: 10.1109/OMEMS.2007.4373851
Current Version Published: 2007-10-29
Abstract
We report a two-axis MEMS scanner driven by radial vertical combdrive actuators. The device is fabricated by a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is designed to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Mechanical rotation angles of plusmn5.4deg at 42 V and plusmn2.4deg at 63 V are obtained for rotation about the lower and upper springs, respectively.
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